Lecture 30 (CHE 323) Chemical Mechanical Polishing (CMP)
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17:24
Lecture 31 (CHE 323) Copper Dual Damascene
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16:40
Chemical Mechanical Planarization, CMP Process Fundamentals: Sec. 5 & 6 - CMP Challenges & Summary
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3:55
Introduction to Chemical Mechanical Planarization/Polishing (CMP) in Semiconductor Fabrication
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11:41
Chemical Mechanical Planarization, CMP Process Fundamentals: Sec 3 - CMP Slurries
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1:44
CMP Process Monitoring
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8:44
Chemical Mechanical Planarization, CMP Process Fundamentals: Sec 4 - CMP Polishing Pads
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1:43
Chemical Mechanical Polishing Tool - Semiconductor Manufacturing
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8:20